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富臨 濺鍍機 SPUTTER

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      SPECIFICATION 

                       for 

          Vertical In Line Sputtering System

Model: FSE-ILSV-Metal-300-S

Prepared By:  ________________________

Checked By:  ___________

Approved By: ___________                Supplier:  F.S.E

DATE : ’10,09,08

Specification Revision History:

Version

Number

Date

Chapter and

paragra ph

Changes compared to previous version

Reason and reference /

Influence on other documents

V2

99/8/24

 

DC power supply update to AE pinnacle 10KW single output.

 

V3

99/8/30

 

Update EQ Performance data 

 

V4

99/8/31

 

Update system Voltage to

AC220V

 

V5

99/9/1

 

Update cathode weight to

200mm & add three Al cathodes.

 

V6

99/9/3

 

Update DC power to AE or equal

 

 

 

 

Add ITO deposition 20nm function & Heat to 25

 

V7

99/9/8

 

Update ITO film buyoff sepc.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

1.            EQUIPMENT OVERVIEW

This equipment is a vertical In line sputter deposition equipment. The equipment is used to deposit Mo-Al-Mo film on glass substrate. The process require include load chamber, load buffer chamber, sputter deposition chamber for Mo-Al-Mo film, unload buffer chamber, and unload chamber. System have heat function, substrate can be heat and control temperature.

2.            EQUIPMENT CONTENT

2.1          DESCRIPTION

    This sputtering system, vertical in line sputter system with function of Mo-Al-Mo deposition film, dual side sputter deposition function, System include heat function, max temperature is 200 in load buffer chamber & max. temperature 250 in sputter chambers.

Carrier loading/unloading function by manual operate model.

2.2          MODEL:  FSE-ILSV-Metal-300-S

2.3          MANUFACTURER:         FULINTEC SCICENC ENGINEERING CO.,LTD. 

NO, 55, Wu-Quan Rd., Shin-Juang City , Taipei, Taiwan, R.O.C.

                                                        02-2290-2333(TEL), 02-8990-4091(FAX)

2.4          PURCHASING CONTENT

    The equipment shall consist of the following features:

  1. Main system-------------------------------------------------------------------------------- 1 set
  2. Control tower ------------------------------------------------------------------------------ 1 set
  3. Utility tower-------------------------------------------------------------------------------- 1 set
  4. Main pump (STPiXA2205C )----------- ---------------------------------------------- 11 set
  5. Process chamber Rough pump (SV-300+EH1200)------------------------------------ 4 set
  6. Carrier (20 sets for metal production, 20 sets for spare)--------------------------- 40 set 2.4.7.    Spare shield (sputter chamber)----------------------------------------------------------- 3 set

2.5          SYSTEM OPERATING REQUIREMENTS:

  1. User interface is 17 inch CheMei LCD panel, and keyboard.
  2. Self-diagnostic function: All alarm message and production status can be displayed in screen.
  3. Logging of user programs, process parameters and production data into floppy diskettes.
  4. Two level password function for operators and maintenance engineers individually
  5. Can be operated in manual, semi-auto and automatic modes
  6. PC based Microsoft Windows XP user interface control unit.

 

2.6          DESIGN REQUIREMENTS

2.6.1

General items

 

 

Outer dimension(include conveyer system)

26M(L)x2.5M(W)x2.0M(H)

 

Loading Function

Carrier in/out

 

Substrate size

Mainly :300mmx200mm 

Thickness : 0.5 ~ 1.1mm

 

Carriage size (Reference only)

750mm(H)x1200mm(L) 

 

Substrate Function

Manual vertical loading on carrier

 

Loading style

Carrier loading by manual operate

 

Transfer Function

Vertical transfer by roller, need to avoid carrier dropping

 

Process pressure gauge

MKS 6262A serial B. gauge or equal type

 

Vacuum gauges

MKS 999 Quattro Multi Sensor or equal type

 

Conveyer system

ATM load/unload stations x 3 sets and Auto

Carrier Magazine system

 

EQ PM Function

Cathode PM hoisting machine.

 

Alarm system

1.  Abnormal source pressure ( CDA, , cooling water, process gas)

2.  System alarm include : TP alarm ; IR over heat; polycold ; pump ; transfer timeout.

& DC arc  

3.  light tower: Red lamp flash (buzzer) 

 

 

 

2.6.2

Load Chamber   

x 1 set 

 

Chamber Material 

SUS 304 ; T:30mm

 

Carriage detection

Contrast laser sensor

 

Low vacuum pump (share)

Leybold SV-300 rough pump or equal                               x 2 sets

 

Booster pump

Edwards EH-1200 booster pump or equal                               x 2 sets

 

Vacuum gauges

MKS 999 Quattro Multi Sensor or equal type

 

Transfer valve

Vertical door valve

 

Vacuum specifications(*A)

Pumping speed: ATM to 3E-1 Torr  40 sec.

 

Transfer method 

Servo Motor ;Vertical transfer by roller

 

 

 

2.6.3

Load Buffer 1 Chamber 

x 1 set 

 

Chamber Material 

SUS 304

 

Carriage detection

Contrast laser sensor

 

High vacuum pump

Edwards STPiXA2205C turbo pump or equal type                 x 1 set

 

Vacuum gauges

Full Range Multi Sensor or equal type

 

Transfer valve

Vertical door valve

 

Vacuum specifications(*A)

1.     Ultimate pressure: 2E-6 Torr

 

 

 

2.     Pumping speed: ATM to 5E-6 Torr 90 min

 

Cold Cap coil 

Poly cold PFC-1100 or equal type x 1 set

 

Process gas control unit

1.     MKS series metal-seal Mass flow controller

2.     Ar

 

Transfer method 

Servo Motor ;Vertical transfer by roller

 

Heater function

Sheath heat system, max. 200

 

 

 

 

2.6.4

Sputtering Process Chamber for Metal

(A side/ 400nm)

 

 

Chamber Material 

SUS 304

 

Carriage detection

Contrast laser sensor

 

High vacuum pump

Edwards STPiXA2205C turbo pump or equal type                x 4 sets

 

Foreline pump 

Leybold SV-300+EH-1200 Rough pump

 

Vacuum gauges

Full range Multi Sensor or equal type

 

Process pressure gauge

B. gauge or equal type

 

Transfer valve

Vertical door valve

 

Vacuum specifications(*A)

1.         Ultimate pressure: 2E-6 Torr

2.         Pumping speed: ATM to 5E-6 Torr 90 min

 

Planar Cathode size (Mo/Al/Mo)

Mo Target size :

650mmx 200mm x 10mm(T)  x 4 sets

Al Target size :

650mmx 200mm x 10mm(T)  x 9 sets

Fixed Magnetic function

Target clamp function

Multi zone gas shower

Uniformity 5 %

Target yield 35%

Target provide by customer.

 

Process gas control unit

1.     MKS series metal-seal Mass flow controller

2.     Ar

3.  

 

DC power supply

AE Pinnacle DC 10KW Generator or equal.

               (single output) x 13 sets

 

Heater function

Sheath heat system, ITO process sub. temp max. is 250 , Sheath heat max. temp is 350 with PID controller. 

 

Cold Cap coil 

Poly cold PFC-1100 or equal type x 1 set

 

Process gases fitting

SWG connection

 

Deposition Method

Single side deposition function.

 

 

System shield sets

3 sets

 

Transfer method 

Servo motor ;Vertical transfer by roller

 

 

 

2.6.5

Transfer Chamber 

x 1 set 

 

Chamber Material 

SUS 304

 

Carriage detection

Contrast laser sensor

 

High vacuum pump

Edwards STPiXA2205C turbo pump or equal type e                   x 1 set

 

Vacuum gauges

Full range Multi Sensor or equal type

 

Transfer valve

Vertical door valve

 

Vacuum specifications(*A)

1.         Ultimate pressure: 2E-6 Torr

2.         Pumping speed: ATM to 5E-6 Torr 90 min

 

Process gas control unit

3.     MKS series metal-seal Mass flow controller

4.     Ar

 

Heater function

Sheath heat system, max. 250

 

 

Transfer method 

Servo motor ;Vertical transfer by roller

 

 

 

2.6.6

Sputtering Process Chamber for Metal

(B side/ 400nm)

 

 

Chamber Material 

SUS 304

 

Carriage detection

Contrast laser sensor

 

High vacuum pump

Edwards STPiXA2205C turbo pump or equal type                    x 4 sets

 

Foreline pump (Share)

Leybold SV-300+EH-1200 Rough pump

 

Vacuum gauges

Full range Multi Sensor or equal type

 

Process pressure gauge

B. gauge or equal type

 

Transfer valve

Vertical door valve

 

Vacuum specifications(*A)

1.         Ultimate pressure: 2E-6 Torr

2.         Pumping speed: ATM to 5E-6 Torr 90 min

 

Planar Cathode size (Mo/Al/Mo)

Mo Target size :

650mmx 200mm x 10mm(T)  x 4 sets

Al Target size :

650mmx 200mm x 10mm(T)  x 9 sets

Fixed Magnetic function

Target clamp function

Multi zone gas shower

Uniformity 5 %

Target yield 35%

Target provide by customer.

 

Process gas control unit

4.   MKS series metal-seal Mass flow controller

 

 

 

5.   Ar

6.